Plasma Cleaning of Surfaces
نویسندگان
چکیده
Plasma cleaning of solid surfaces is one of the hot topics of the very fast developing field of plasma treatment of materials. Plasma cleaning has been implemented already in several industries such as semiconductor processing and microchip fabrication, metallurgy, the optical industry, dentistry, medical technologies, food packaging – to name just the most important areas. Understanding the basic of plasma cleaning is very important, if not critical for the efficient and effective utilization of plasma cleaning technologies as well as for applying it to new fields. This tutorial paper is the continuation of our previous papers on non-thermal plasmas and describes some basics aspects of plasma cleaning.
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